✦ LIBER ✦

Contamination of silicon during ion-implantation and annealing

✍ Scribed by Xiao Liu; R.O Pohl; Sally Asher; R.S Crandall

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Time-resolved reflectivity of ion-implan

✍ Auston, D. H.; Surko, C. M.; Venkatesan, T. N. C.; Slusher, R. E.; Golovchenko, 📂 Article 📅 1978 🏛 American Institute of Physics 🌐 English ⚖ 613 KB

The Behaviour of Arsenic in Crystals of

✍ Komakov, F. F. ;Novikov, A. P. ;Kotov, E. V. ;Podlipko, E. A. 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 268 KB

Melting model and Raman scattering durin

✍ Wood, R. F. 📂 Article 📅 1982 🏛 American Institute of Physics 🌐 English ⚖ 564 KB

Annealing of silicon implanted with arsi

✍ Yokota, Katsuhiro ;Nakase, Shuusaku ;Nakamura, Kazuhiro ;Tannjou, Masayasu ;Mats 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 81 KB

Damage production and annealing of ion i

✍ A. Heft; E. Wendler; J. Heindl; T. Bachmann; E. Glaser; H.P. Strunk; W. Wesch 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 565 KB

The annealing of light ion implantation

✍ Amitabh Jain 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 203 KB