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Concentration and depth profiles of elements in SixNyHz/Si thin films produced by PECVD

✍ Scribed by G. Murillo; E. Andrade; J.C. Alonso; L. Acosta; M.F. Rocha; E.P. Zavala; R. Policroniades

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
210 KB
Volume
249
Category
Article
ISSN
0168-583X

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