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A simple estimate of deposited energy and concentration profiles in films produced by Ion-Assisted Physical Vapour Deposition

✍ Scribed by K. G. Grigorov; D. Bouchier; G. I. Grigorov; J-L Vignes; J-P Langeron

Publisher
Springer
Year
1994
Tongue
English
Weight
340 KB
Volume
58
Category
Article
ISSN
1432-0630

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