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Comprehensive perspective on the mechanism of preferred orientation in reactive-sputter-deposited nitrides

โœ Scribed by Kajikawa, Yuya; Noda, Suguru; Komiyama, Hiroshi


Book ID
121279621
Publisher
AVS (American Vacuum Society)
Year
2003
Tongue
English
Weight
608 KB
Volume
21
Category
Article
ISSN
0734-2101

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