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Effect of hydrogen addition on the preferred orientation of AlN films prepared by reactive sputtering

โœ Scribed by HwandashChul Lee; Ki-Young Lee; YoondashJoong Yong; Jai-Young Lee; GuendashHong Kim


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
687 KB
Volume
271
Category
Article
ISSN
0040-6090

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