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Composition, structure, and nanomechanical properties of DC-sputtered CrNx (0≤x≤1) thin films

✍ Scribed by G Wei; A Rar; J.A Barnard


Book ID
117226631
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
155 KB
Volume
398-399
Category
Article
ISSN
0040-6090

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