𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Structure and properties of ion-beam sputtered AsxS1 − x films

✍ Scribed by M.D. Mikhailov; I.I. Kryzhanowsky; I.M. Petcherizin


Book ID
117150481
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
175 KB
Volume
265
Category
Article
ISSN
0022-3093

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Ion beam characterization of rf-sputter
✍ N. Matsunami; S. Venkatachalam; M. Tazawa; H. Kakiuchida; M. Sataka 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 387 KB

Aluminum nitride (AlN) thin films have been deposited on Si(1 1 1) substrates by using reactive-rf-magnetron-sputtering at 250 °C. The crystalline quality and orientation of the films have been studied by X-ray diffraction (XRD). We have observed that the films grow with c-or a-axis orientation. The