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Composition and thickness determination of thin oxide films: comparison of different programs and methods

โœ Scribed by Sammelselg, V.; Aarik, J.; Aidla, A.; Kasikov, A.; Heikinheimo, E.; Peussa, M.; Niinist, L.


Book ID
119943037
Publisher
Royal Society of Chemistry
Year
1999
Tongue
English
Weight
123 KB
Volume
14
Category
Article
ISSN
0267-9477

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