Quantitative analysis of overlapping XPS peaks by spectrum reconstruction: determination of the thickness and composition of thin iron oxide films
✍ Scribed by Graat, Peter; Somers, Marcel A. J.
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 333 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
The composition and thickness of thin iron oxide Ðlms on polycrystalline pure iron were evaluated from Fe 2p spectra as measured by x-ray photoelectron spectroscopy. To this end the experimental spectra were reconstructed from reference spectra of the constituents Fe0, Fe2' and Fe3'. The background contributions in the spectra owing to inelastic scattering of signal electrons were calculated from the depth distributions of these constituents and their reference spectra. In the reconstruction procedure the Ðlm thickness and the concentrations of Fe2' and Fe3' in the oxide Ðlm were used as Ðt parameters. The values obtained for the oxide Ðlm thickness were compared with thickness values determined from the intensity of the corresponding O 1s spectra and with thickness values resulting from ellipsometric analysis. The sensitivity of the reconstruction procedure with regard to Ðlm thickness and Ðlm composition was tested.