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Composition and structure of silicon carbonitride layers grown on Si(100)/(Fe, N, Co) substrates

✍ Scribed by N. I. Fainer, V. I. Kosyakov, Yu. M. Rumyantsev, E. A. Maximovskii, S. A. Prokhorova, P. N. Gevko

No coin nor oath required. For personal study only.

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