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Structural characterization of low temperature Epi-silicon grown on {100} and {111} Si substrates using ultrahigh resolution cross-sectional TEM

✍ Scribed by Zhizhen Ye; Yaping Liu; Zhen-Hong Zhou; Rafael Reif


Book ID
112819604
Publisher
Springer US
Year
1993
Tongue
English
Weight
913 KB
Volume
22
Category
Article
ISSN
0361-5235

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