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Complex investigation of silicon nitride films deposited on silicon by pyrolysis in vacuum: V S Tulovchikov et al, Elektron Tekh Upr Kachestv Standart, 5, 1970, 67–73 (in Russian)

Publisher: Elsevier Science
Year: 1971
Tongue: English
Weight: 155 KB
Volume: 21
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(71)90168-0

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