𝔖 Bobbio Scriptorium

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1541. Properties of silicon nitride thin films prepared by cathodic sputtering: S A Kutolin et al, Elektron Tekh Materialy, 5, 1970, 63–67 (in Russian)

Publisher: Elsevier Science
Year: 1971
Tongue: English
Weight: 138 KB
Volume: 21
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(71)90355-1

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