𝔖 Bobbio Scriptorium

✦ LIBER ✦

1148. Complex investigation of silicon nitride films deposited on silicon by pyrolysis in vacuum: V S Tulobchikov et al, elektron tekh upr kachest standart, 5, 1970, 67—73 (in Russian).

Publisher: Elsevier Science
Year: 1971
Tongue: English
Weight: 144 KB
Volume: 21
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(71)92309-8

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1147. Investigations of processes of man

1147. Investigations of processes of manufacture and application of dielectric films on the basis of aluminim nitride in MIS transistors: I V Stepanov et al, elektron tekh upr kachest standart, 5, 1970, 51–60 (in Russian).

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