1147. Investigations of processes of manufacture and application of dielectric films on the basis of aluminim nitride in MIS transistors: I V Stepanov et al, elektron tekh upr kachest standart, 5, 1970, 51–60 (in Russian).

• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 144 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)92308-6