Investigation of processes of manufacture and application of dielectric films on the basis of aluminium nitride in MIS transistors : I. V. Stepanovet al. Elektrons Tekh Upr Kachest Standart5 (1970), p. 51. (In Russian.)

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 104 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90164-3