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Competitive growth mechanisms of aluminum nitride thin films deposited by off-normal reactive magnetron sputtering

โœ Scribed by Deniz, D.; Karabacak, T.; Harper, J. M. E.

Book ID
120278680
Publisher
American Institute of Physics
Year
2008
Tongue
English
Weight
578 KB
Volume
103
Category
Article
ISSN
0021-8979

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