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Fiber textures of titanium nitride and hafnium nitride thin films deposited by off-normal incidence magnetron sputtering

✍ Scribed by Deniz, D.; Harper, J. M. E.


Book ID
111915386
Publisher
American Institute of Physics
Year
2008
Tongue
English
Weight
734 KB
Volume
104
Category
Article
ISSN
0021-8979

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