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Comparisons of the electrical characteristics by impedance matching conditions on the E–H and H–E transition and the hysteresis of inductively coupled plasma

✍ Scribed by Hyo-Chang Lee; Chin-Wook Chung


Book ID
118501861
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
287 KB
Volume
521
Category
Article
ISSN
0040-6090

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