✦ LIBER ✦
Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma
✍ Scribed by Lee, Hyo-Chang; Kim, Young-Cheol; Chung, Chin-Wook
- Book ID
- 115449461
- Publisher
- IEEE
- Year
- 2011
- Tongue
- English
- Weight
- 316 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0093-3813
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