Actions of low- and high-energy electrons on the phase transition between E- and H-modes in an inductively coupled plasma in Ar

✍ Scribed by Hayashi, Yuichiro; Mitsui, Yo; Tatsumi, Tetsuya; Makabe, Toshiaki

• Book ID: 121480979
• Publisher: Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 1019 KB
• Volume: 13
• Category: Article
• ISSN: 1367-2630
• DOI: 10.1088/1367-2630/13/7/073025