Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF 4 mixtures

✍ Scribed by Miyoshi, Y; Petrovic, Zoran Lj; Makabe, Toshiaki

• Book ID: 126058859
• Publisher: Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 775 KB
• Volume: 35
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/35/5/307