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E–H mode transition in inductively coupled plasma using Ar, O2, N2, and mixture gas

✍ Scribed by Jung-Kyu Lee; Hyo-Chang Lee; Chin-Wook Chung


Book ID
113514073
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
972 KB
Volume
11
Category
Article
ISSN
1567-1739

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