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Comparison of high temperature annealed Czochralski silicon wafers and epitaxial wafers

✍ Scribed by D. Gräf; U. Lambert; M. Brohl; A. Ehlert; R. Wahlich; P. Wagner


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
389 KB
Volume
36
Category
Article
ISSN
0921-5107

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