Thermal Warpage of Czochralski Silicon Wafers Grown under a Nitrogen Ambience

✍ Scribed by Lu, Huanming ;Yang, Deren ;Li, Liben ;Ye, Zhizhen ;Que, Duanlin

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 141 KB
• Volume: 169
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199810)169:2<193::aid-pssa193>3.0.co;2-j