✦ LIBER ✦
Comparison of fast radiation-annealed and isothermally annealed 75As+-implanted layers on silicon wafers
✍ Scribed by Anatol Feygenson; Jay N. Zemel
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 671 KB
- Volume
- 118
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.