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Oxygen precipitation in heavily phosphorus-doped silicon wafer annealed at high temperatures

โœ Scribed by Yuheng Zeng; Deren Yang; Xiangyang Ma; Jiahe Chen; Duanlin Que

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
612 KB
Volume
159-160
Category
Article
ISSN
0921-5107

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