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Combined optical and X-ray interferometry for high-precision dimensional metrology

✍ Scribed by Basile, G.; Becker, P.; Bergamin, A.; Cavagnero, G.; Franks, A.; Jackson, K.; Kuetgens, U.; Mana, G.; Palmer, E. W.; Robbie, C. J.

Book ID: 111916151
Publisher: The Royal Society
Year: 2000
Tongue: English
Weight: 710 KB
Volume: 456
Category: Article
ISSN: 0962-8444
DOI: 10.1098/rspa.2000.0536

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