✦ LIBER ✦
Sub-nm accuracy metrology for ultra-precise reflective X-ray optics
✍ Scribed by F. Siewert; J. Buchheim; T. Zeschke; G. Brenner; S. Kapitzki; K. Tiedtke
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 918 KB
- Volume
- 635
- Category
- Article
- ISSN
- 0168-9002
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