A nano-metrology system with a two-dimensional combined optical and X-ray interferometer and an atomic force microscope

✍ Scribed by Jinwon Park; Moo-Yeon Lee; Dong-Yeon Lee

• Book ID: 106185788
• Publisher: Springer-Verlag
• Year: 2009
• Tongue: English
• Weight: 331 KB
• Volume: 15
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-009-0916-0