Degradation of system resolution by activation of scanning coils in a combined transmission and scanning electron microscope equipped with an energy-dispersive x-ray spectrometer

✍ Scribed by Norbert Roos; Tudor Barnard

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 83 KB
• Volume: 12
• Category: Article
• ISSN: 0304-3991
• DOI: 10.1016/0304-3991(83)90292-9