Chemistry of Atomic Layer Deposition

✍ Scribed by Seán Thomas Barry

Publisher: De Gruyter
Year: 2021
Tongue: English
Leaves: 113
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Covers the fundamental chemistry behind ALD.
Main audience is engineers using ALD and graduate students across all disciplines.
Written by one of the most prominent Canadian researchers in the field of ALD.

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