Atomic Layer Deposition for Semiconductors

✍ Scribed by Yoo, Cha Young;Seong Hwang, Cheol

Publisher: Springer
Year: 2014
Tongue: English
Leaves: 265
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

Fundamentals -- ALD for memory devices -- ALD for logic devices -- ALD machines.;Atomic Layer Deposition (ALD) was originally designed for depositing uniform passivation layers over a very large area for display devices in the late 1970s. Only recently, in the 21st century, has the this technique become popular for high integrated semiconductor memory devices. This book discusses ALD for all modern semiconductor devices, the basic chemistry of ALD, and models of ALD processes. The book also details ALD for both mass produced memories and emerging memories. Each chapter of the book provides history, operating principles, and a full explanation of ALD processes for each device.

✦ Table of Contents

Fundamentals --
ALD for memory devices --
ALD for logic devices --
ALD machines.

✦ Subjects

Semiconductors--Surfaces;TECHNOLOGY & ENGINEERING--Mechanical;Electronic books;Semiconductors -- Surfaces;TECHNOLOGY & ENGINEERING -- Mechanical

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