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ChemInform Abstract: Filament-Activated Chemical Vapor Deposition of Nitride Thin Films

โœ Scribed by S. V. DESHPANDE; J. L. DUPUIE; E. GULARI

Book ID
112038142
Publisher
John Wiley and Sons
Year
2010
Weight
27 KB
Volume
27
Category
Article
ISSN
0931-7597

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