✦ LIBER ✦

Chemical vapour deposition of crystalline thin films of tantalum phosphide

✍ Scribed by C.S. Blackman; C.J. Carmalt; I.P. Parkin; S.A. O'Neill; K.C. Molloy; L. Apostolico

Book ID: 117357470
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 123 KB
Volume: 57
Category: Article
ISSN: 0167-577X
DOI: 10.1016/s0167-577x(02)01341-1

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thin-Film Deposition of Metal Oxides by

Thin-Film Deposition of Metal Oxides by Aerosol-Assisted Chemical Vapour Deposition: Evaluation of Film Crystallinity

✍ Takeuchi, Masahiro; Maki, Kunisuke 📂 Article 📅 2007 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 141 KB

Low pressure chemical vapour deposition

Low pressure chemical vapour deposition of tantalum pentoxide thin layers

✍ E.P. Burte; N. Rausch 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 297 KB

Chemical vapour deposition of tantalum d

Chemical vapour deposition of tantalum disilicide

✍ C. Wieczorek 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 354 KB

The Chemical Vapour Deposition of Tantal

The Chemical Vapour Deposition of Tantalum

✍ Drs. D. J. Jerreat; Rees D. Rawlings 📂 Article 📅 1974 🏛 John Wiley and Sons 🌐 English ⚖ 485 KB

## Abstract The effect of the total pressure, feed temperature, deposition temperature, and reaction tube inclination and geometry on the chemical vapour deposition of tantalum from the pentaiodide has been investigated. Transport rates as high as 350 mg hr^−1^ were achieved in inclined tubes of sp

Deposition of tantalum oxide films by Ar

Deposition of tantalum oxide films by ArF excimer laser chemical vapour deposition

✍ Yukio Nishimura; Kyoji Tokunaga; Masaharu Tsuji 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 478 KB

Chemical vapour deposition of zirconium

Chemical vapour deposition of zirconium phosphide whiskers

✍ Seiji Motojima; Yasutaka Takahashi; Kozoh Sugiyama 📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 816 KB