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Thin-Film Deposition of Metal Oxides by Aerosol-Assisted Chemical Vapour Deposition: Evaluation of Film Crystallinity

โœ Scribed by Takeuchi, Masahiro; Maki, Kunisuke


Book ID
126818365
Publisher
Institute of Pure and Applied Physics
Year
2007
Tongue
English
Weight
141 KB
Volume
46
Category
Article
ISSN
0021-4922

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