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Chemical bonding in microcrystalline Si:H:Cl films studied by ion-induced Auger Electron Spectroscopy

✍ Scribed by E. Grossman; A. Grill; M. Polak

Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
227 KB
Volume
173
Category
Article
ISSN
0040-6090

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