Photon energy dependence of synchrotron radiation induced growth suppression and initiation in Al chemical vapor deposition II. Surface analysis by Auger electron spectroscopy

✍ Scribed by Iwao Nishiyama; Fumihiko Uesugi

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 744 KB
• Volume: 103
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(96)00525-9