Photon energy dependence of synchrotron radiation induced growth suppression and initiation in Al chemical vapor deposition

✍ Scribed by Fumihiko Uesugi; Iwao Nishiyama

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 325 KB
• Volume: 79-80
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(94)90410-3