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Chemical and mechanical characterization of TiO2/Al2O3 atomic layer depositions on AISI 316 L stainless steel

✍ Scribed by E. Marin; A. Lanzutti; M. Lekka; L. Guzman; W. Ensinger; L. Fedrizzi

No coin nor oath required. For personal study only.

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Multilayer Al2O3/TiO2 Atomic Layer Depos

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