✦ LIBER ✦

Characterization on polymerized thin films for low-k insulator using PECVD

✍ Scribed by I.-S. Bae; S.-J. Cho; W.S. Choi; H.J. Cho; B. Hong; H.-D. Jeong; J.-H. Boo

Book ID: 113858967
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 693 KB
Volume: 61
Category: Article
ISSN: 0033-0655
DOI: 10.1016/j.porgcoat.2007.09.031

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Deposition characterization of low-k hyb

Deposition characterization of low-k hybrid thin films using methyl methacrylate for ULSI applications

✍ Bhavana N. Joshi; Ashok M. Mahajan 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 427 KB

Nano-crystalline Si1 − xCx:H t

Nano-crystalline Si1 − xCx:H thin films deposited by PECVD for SiC-on-insulator application

✍ N.A.E. Forhan; M.C.A. Fantini; I. Pereyra 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 354 KB

Characterization of polymer-like thin fi

Characterization of polymer-like thin films deposited on silicon and glass substrates using PECVD method

✍ M.-C. Kim; S.-H. Cho; S.-B. Lee; Y. Kim; J.-H. Boo 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 725 KB

Thermoelectric characterization of Si th

Thermoelectric characterization of Si thin films in silicon-on-insulator wafers

✍ Liao, C. N.; Chen, C.; Tu, K. N. 📂 Article 📅 1999 🏛 American Institute of Physics 🌐 English ⚖ 837 KB

Characterization of chemical-vapor-depos

Characterization of chemical-vapor-deposited low-k thin films using x-ray porosimetry

✍ Lee, Hae-Jeong; Lin, Eric K.; Bauer, Barry J.; Wu, Wen-li; Hwang, Byung Keun; Gr 📂 Article 📅 2003 🏛 American Institute of Physics 🌐 English ⚖ 314 KB

Discussion on "Thin polymeric films for

Discussion on "Thin polymeric films for use as dielectrics"

📂 Article 📅 1961 🏛 Institution of Electrical Engineers ⚖ 199 KB