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Deposition characterization of low-k hybrid thin films using methyl methacrylate for ULSI applications

✍ Scribed by Bhavana N. Joshi; Ashok M. Mahajan

Book ID: 103844541
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 427 KB
Volume: 168
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2009.12.030

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