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Characterization of chemical-vapor-deposited low-k thin films using x-ray porosimetry

โœ Scribed by Lee, Hae-Jeong; Lin, Eric K.; Bauer, Barry J.; Wu, Wen-li; Hwang, Byung Keun; Gray, William D.

Book ID
111906507
Publisher
American Institute of Physics
Year
2003
Tongue
English
Weight
314 KB
Volume
82
Category
Article
ISSN
0003-6951

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