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Low temperature formation of graphite thin films by chemical vapor deposition

โœ Scribed by Rie Kikuchi; Masako Yudasaka; Takeo Matsui; Yoshimasa Ohki; Etsuro Ota; Susumu Yoshimura


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
124 KB
Volume
34
Category
Article
ISSN
0008-6223

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Graphite film formation by chemical vapo
โœ M. Yudasaka; R. Klkuchi; T. Matsui; Y. Ohki; E. Ota; S. Yoshimura ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 438 KB

Graphite thin films can be formed by CVD on Ni films with a thickness of 500 A deposited on sapphire (1 lo), ( 001) and ( 012) faces. The c-axis of the graphite film deposited on Ni/sapphire (110) is almost perpendicular to the sapphire surface. However, its structure is not homogeneous nor flat. Th