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Nano-crystalline Si1 − xCx:H thin films deposited by PECVD for SiC-on-insulator application

✍ Scribed by N.A.E. Forhan; M.C.A. Fantini; I. Pereyra

No coin nor oath required. For personal study only.

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Nano-crystalline Si1&#xa0;−&#xa0;xCx:H thin films deposited by PECVD for SiC-on-insulator application