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Characterization of polymer-like thin films deposited on silicon and glass substrates using PECVD method

✍ Scribed by M.-C. Kim; S.-H. Cho; S.-B. Lee; Y. Kim; J.-H. Boo


Book ID
113936416
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
725 KB
Volume
447-448
Category
Article
ISSN
0040-6090

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