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Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique

✍ Scribed by Vilma Buršíková; Petr Sládek; Pavel St’ahel; J. Buršík

Book ID
116669143
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
133 KB
Volume
352
Category
Article
ISSN
0022-3093

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## Abstract Transparent and conductive Al‐doped ZnO (AZO) films with thickness between 0.2 and 1.1 μm were deposited by sputtering at room temperature on glass and polyethylene terephthalate (PET) substrates. All films were polycrystalline with average crystallite size increasing when the film thic