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Characterization of trimethylaluminum-N2O—He glow discharge in plasma-enhanced chemical vapor deposition of aluminum oxide films

✍ Scribed by Yong-Chun Kim; John S. Chun; Won-Jong Lee

Book ID
107864877
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
890 KB
Volume
258
Category
Article
ISSN
0040-6090

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