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Characterization of the oxidized indium thin films with thermal oxidation

✍ Scribed by Min-Suk Lee; Won Chel Choi; Eun Kyu Kim; Chun Keun Kim; Suk-Ki Min

Book ID
107864898
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
350 KB
Volume
279
Category
Article
ISSN
0040-6090

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## Abstract Selected properties of indium‐tin‐oxide (ITO) films prepared by r.f. diode sputtering have been investigated in consideration of surface morphology, optical properties, crystal structure and phase formation, electrical resistivity and chemical resistance. The ITO films showed low electr