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Characterization of indium tin oxide films

✍ Scribed by K.R. Murali; V. Sambasivam; M. Jayachandran; Mary Juliana Chockalingam; N. Rangarajan; V.K. Venkatesan


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
429 KB
Volume
35
Category
Article
ISSN
0257-8972

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## Abstract Selected properties of indium‐tin‐oxide (ITO) films prepared by r.f. diode sputtering have been investigated in consideration of surface morphology, optical properties, crystal structure and phase formation, electrical resistivity and chemical resistance. The ITO films showed low electr